Ultrasonic application equipment FUJI ULTRASONIC ENGINEERING

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Top > In-line Concentration Meter > High grade models

High grade models


単成分濃度計（高精度）
FUD-1 Model-130 / FUD-1 Model-530

The high-grade models can provide tighter & more stable concentration measurement




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 [Brochure] FUD-1 SEMI selection (1.5MB) お問い合わせ
 

System Configuration

FUD-1　Model-130
単成分濃度計（高精度）

Advantages

 ● Ultrasonic velocity method ➤ Real time measurement with tight accuracy
 ● No moving part design ➤ No need for periodical parts replacement & calibration
 ● Compact PFA flow cell ➤ No corrosion for the chemical
 ● Easy installation ➤ No calibration at installation
 ● Useful functions
 ➤ Easy system integration for process control in real time

Applications

  • H2O2 concentration monitoring at CMP process
  • TMAH, KOH, NH4OH, etc monitoring at dilution process
  • HF+H2SiF6, HF+HNO3, etc. monitoring at cleaning process
  • TMAH+Resist, KOH+Si, etc monitoring at etching process


Specifications

Name FUD-1 Model-130
Measurement parametersUltrasonic velocity and temperature
Display LCD (concentration, temperature, velocity/various parameters)
Output
 Analog / DC4 - 20mA (adjustable depend on a concentration figure)

Digital / RS232C (concentration, temperature, velocity, error code)

Alarm / high, low, error
Power AC100-240V 50/60Hz, 30VA / DC24V
Transmitter Panel mount type (DIN Standard)
Functions
 Output setting, Alarm-output setting, Average times setting,
Offset and Gain setting, Self-diagnosis-check,
Fail Safe Mode, Auto Error Canceller Mode
Option RS485 Output (Alternative choice with RS232C.)
Temp. Output (DC4 - 20mA)
Channel max. 10ch.
Cable
 6m
Sensor material
 PFA coating
Fitting connector
 1/2 to 1 inch various brands
Environment
Transmitter
 10 – 40 degree C RH less than 85%
 Transducer 5 – 45 degree C
 Fluid temp. 0 – 50 degree C
 Pressure 0.3MPa or less
 Flow rate
 5 lpm or less

Name FUD-1 Model-530
Measurement parametersUltrasonic velocity, conductivity and temperature
Display LCD (concentration 1 & 2, temperature, velocity, conductivity/various parameters)
Output
 Analog / DC4 - 20mA : 2 lines (adjustable depend on a concentration figure)

Digital / RS232C (concentration 1 & 2, temperature, velocity, conductivity, error code)

Alarm / high, low, error 2 lines
Power AC100-240V 50/60Hz, 30VA / DC24A
Transmitter Panel mount type (DIN Standard)
Functions
 Output setting, Alarm-output setting, Average times setting,

Offset and Gain setting, Self-diagnosis-check,
Fail Safe Mode,
Auto Error Canceller Mode
Option RS485 Output (Alternative choice with RS232C.)

Temp. Output (DC4 - 20mA)
Channel max. 7ch.
Cable
 6m
Sensor material
 PFA coating
Fitting connector
 1/2 to 1 inch various brands
Environment
Transmitter
 10 – 40 degree C RH less than 85%
 Transducer 5 – 45 degree C
 Fluid temp. 0 – 50 degree C
 Pressure 0.3MPa or less
 Flow rate
 5 lpm or less

FUJI ULTRASONIC ENGINEERING
1068 Iida-cho, Chuo-ku, Hamamatsu, Shizuoka 435-0028
TEL.+81-53-464-6460 FAX.+81-053-465-3815
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