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Binary Model (Flow cell type)

FUD-1 Model-13

The flow cell type model features a small flow cell type transducer designed for applications of binary solutions in semiconductor manufacturing.

[Brochure] FUD-1 SEMI selection (1.5MB)

System Configuration

FUD-1　Model-13　Example
単成分濃度計（専用）

Advantages

● Ultrasonic velocity method	➤ Real time measurement with tight accuracy
● No moving part design	➤No need for periodical parts replacement & calibration
● Compact PFA flow cell	➤No corrosion for the chemical
● Easy installation	➤ No calibration at installation
● Useful functions	➤ Easy system integration for process control in real time

Applications

H2O2 concentration monitoring at CMP process
TMAH, HNO3, H2SO4, HCl, etc monitoring at dilution process
HF, NH4OH, KOH, IPA, etc. monitoring at cleaning process
HF, H2SO4, etc monitoring at etching process

Specifications

Name		FUD-1 Model-13
Measurement parameters		Ultrasonic velocity and temperature
Display		LCD (concentration, temperature, velocity/various parameters)
Output		Analog / DC4 - 20mA (adjustable depend on a concentration figure) Digital / RS232C (concentration, temperature, velocity, error code) Alarm / high, low, error
Power		AC100-240V 50/60Hz, 30VA
Transmitter		Panel mount type (DIN Standard), Rack type, Rack type with a Rain-Proof Case
Environment		Temp.0 – 50 degree C, RH less than 85% (No dew condensation) 0 – 100 degree C, -10 – 160 degree C (100 degree C span) [Option]
Function		Output setting, Alarm-output setting, Average times setting, Offset and Gain setting, Self-diagnosis-check,Fail Safe Mode, Auto Error Canceller Mode
Option		RS485 Output (Alternative choice with RS232C.) Temp. Output (DC4 - 20mA)
Channel		max. 10ch.
Adaptable transducer		Model-13 : SA-20S26 / SA-20S27 / SA-20M5

FUJI ULTRASONIC ENGINEERING

1068 Iida-cho, Chuo-ku, Hamamatsu, Shizuoka 435-0028